SEM (Scanning Electron Microscope) - LS

Specification : Optics Console Resolution : ~ 5nm@20kV (Option 4nm@30KV) Acceleration Voltage : 0.6~1KV (increase by 100eV) amp; 1KV~20K(30KV) increase by 1kV Visual Inspection Source : Electron induced Display (Tungsten Hair Pin Type) Probe Current : ~ Max 8uA Magnification #34;: X 10 ~ Max 150,000X @20kV true zoom [Option :X10~Max 200,000X@20KV with M.A Resolution 4nm) (Additional Digital Zoom 2X/4X/8X available) #34; Image Shift : X/Y=250㎛, Rotation=360 o Lens System : 2 Stage - Electromagnetic Condenser Lens 1 Stage - Electromagnetic Objective Lens Detector : High Sensitivity ET type SE Detector Image mode : Search (320x240)/Inspection(640x480)/ Photo Mode(1280x960~3840x2880) Chamber #34;: Dia 180X210(H)mm Ports for: SE, BSE, EDS, and etc. #34; Port for: SE, BSE, EDS, CCD and etc #34; Top-view CCD Camera for multi-sample navigation Specimen - Dia. 80mmX 50mm(H) or more - loadable IR Chamber CCD for inside observation #34; Stage Movement Stroke : 5 Axis stage X-Y Z Movement : 40/40/40mm (Z Travel ~ 60mm) R : 360° continous Tilt : 0° ~ 60° (Max 105° with Tilt holder) 3 Axis (X/Y/R) are motorized